Title :
The Laser Ion Implantation Facility LIIF: design and first results
Author :
Boody, F.P. ; Kempf, James ; Hopfl, R. ; Hora, Heinrich ; Laska, L. ; Juha, L. ; Rohlena, K. ; Krasa, Josef ; Pfeifer, Miroslav ; Woryna, F. ; Wolowski, J. ; Pefina, V.
Author_Institution :
Laser Ion Implantation Collaboration, FHR-ET, Regensburg, Germany
Abstract :
Summary form only given. The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions are presented.
Keywords :
ion implantation; ion sources; laser ablation; plasma materials processing; surface treatment; Laser Ion Implantation Facility; commercial feasibility; design details; implanting ions; industrial excimer laser; ion source; plasma chamber; Aluminum alloys; Diodes; Fluid flow; Gas lasers; Ion implantation; Large Hadron Collider; Mirrors; Optical design; Powders; Pulse width modulation;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910376
