Title :
The IMGC calibration set-up for microdisplacement actuators
Author :
Sacconi, A. ; Picotto, G.B. ; Pasin, W.
Author_Institution :
Ist. di Metrol., CNR, Torino, Italy
Abstract :
In the calibration of piezo-capacitive displacement actuators, use is made of an interferometric set-up with sub-nanometric resolution. In order to minimise the periodic non-linearity effect of the interferometer, accurate /spl lambda/-steps are obtained from a computer-based loop control of the out-of-phase between the reference and the measuring signal of the interferometer. Experimental results show a standard uncertainty of about 1 nm+0.7/spl middot/10/sup -4/ L//spl mu/m.
Keywords :
calibration; capacitive sensors; closed loop systems; digital control; displacement control; heterodyne detection; laboratory techniques; light interferometers; light interferometry; measurement by laser beam; measurement uncertainty; microactuators; micropositioning; optical control; piezoelectric actuators; position measurement; transfer standards; IMGC calibration set-up; PC-based control; accurate /spl lambda/-steps; capacitive sensors; closed loop displacement control; computer-based loop control; differential interferometer; digital control; heterodyne technique; integrated position sensors; interferometric set-up; microdisplacement actuators; optical path difference; periodic nonlinearity effect; piezo-capacitive displacement actuators; precise positioning; roundness measurement; signal out-of-phase; standard uncertainty; submicron metrology; subnanometric resolution; transfer standard; translators; Actuators; Calibration; Displacement control; Linearity; Nonlinear optics; Optical interferometry; Optical mixing; Optical receivers; Optical refraction; Transducers;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.699963
