• DocumentCode
    2957717
  • Title

    The generalized model of plasma technological system node and its applications

  • Author

    Geller, V.M. ; Khrustalev, V.A. ; Vantsev, D.V.

  • Author_Institution
    Novosibirsk State Tech. Univ., Novosibirsk
  • fYear
    2007
  • fDate
    3-6 Oct. 2007
  • Firstpage
    602
  • Lastpage
    605
  • Abstract
    In practical problems of plasma technology an engineer is often confronted with the complicated character of plasma processes taking place in a plasma reactor. It must take into consideration some factors caused with as the plasma processes as the constructive and geometrical characteristics of technological reactors and processing items. The plasma process control problem may be noticeably simplified with using simplifying models of plasma effects existing in the plasma device and reactor inner space. One such model is proposed and analyzed in this paper.
  • Keywords
    plasma applications; plasma devices; plasma filled waveguides; plasma simulation; doubly-connected cavity waveguide section; generalized model; geometrical characteristics; plasma device; plasma process control; plasma processes; plasma reactor; plasma technological system node; technological reactors; Conductivity; Frequency; Inductors; Insulation; Plasma applications; Plasma devices; Plasma materials processing; Plasma properties; Plasma waves; Space technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Strategic Technology, 2007. IFOST 2007. International Forum on
  • Conference_Location
    Ulaanbaatar
  • Print_ISBN
    978-1-4244-3589-0
  • Electronic_ISBN
    978-1-4244-1831-2
  • Type

    conf

  • DOI
    10.1109/IFOST.2007.4798671
  • Filename
    4798671