Title :
On the use of test structures for the electro-mechanical characterization of a CMOS compatible MEMS technology
Author :
Latorre, Laurent ; Bertrand, Yves ; Nouet, Pascal
Author_Institution :
Univ. des Sci. et Tech. du Languedoc, Montpellier, France
Abstract :
In this paper, we discuss the use of test structures to characterize a microsystem technology. Using simple devices and elementary mechanical relations, we determine the properties of sensor components, i.e. the piezoresistive factor of polysilicon and a complete set of electro-mechanical relations that can be used for microsystems design
Keywords :
CMOS integrated circuits; VLSI; electric sensing devices; micromachining; microsensors; piezoresistance; piezoresistive devices; semiconductor device testing; CMOS compatible MEMS technology; Si; electro-mechanical characterization; electro-mechanical relations; elementary mechanical relations; microsystem technology; microsystems design; polysilicon piezoresistive factor; sensor components; test structures; Application specific integrated circuits; CMOS technology; Costs; Micromachining; Micromechanical devices; Sensor phenomena and characterization; Silicon; Space technology; Testing; Very large scale integration;
Conference_Titel :
Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
0-7803-4348-4
DOI :
10.1109/ICMTS.1998.688064
