Title :
A monolithic polymeric microgripper with photo-thermal actuation for biomanipulation
Author :
Elbuken, Caglar ; Gui, Lin ; Ren, Carolyn L. ; Yavuz, Mustafa ; Khamesee, Mir Behrad
Author_Institution :
Mech. & Mechatron. Eng., Univ. of Waterloo, Waterloo, ON
Abstract :
Design, simulation, fabrication and characterization of polymeric photo-thermal microgrippers are presented. The microgrippers were fabricated using a single layer of SU-8. Thermal actuation was achieved in a non-contact manner by focusing laser beam on the grippers from a remote source. Finite element simulations of the microgrippers are presented to investigate the temperature distribution, finger deflection and induced stress. The experimental results demonstrate that the polymeric microgripper with a length of 900 mum can achieve a deflection of 22 mum. The microgrippers also feature high repeatability and biocompatibility, therefore they can be used for microassembly and biomanipulation applications specifically for single cell manipulation.
Keywords :
finite element analysis; grippers; medical robotics; micromanipulators; temperature distribution; biocompatibility; biomanipulation; finger deflection; finite element simulation; high repeatability; induced stress; laser beam; monolithic polymeric microgripper; polymeric photo-thermal microgripper; size 900 mum; temperature distribution; thermal actuation; Automation; Finite element methods; Grippers; Heat transfer; Mechatronics; Optical device fabrication; Optical devices; Polymers; Silicon; Temperature;
Conference_Titel :
Mechatronics and Automation, 2008. ICMA 2008. IEEE International Conference on
Conference_Location :
Takamatsu
Print_ISBN :
978-1-4244-2631-7
Electronic_ISBN :
978-1-4244-2632-4
DOI :
10.1109/ICMA.2008.4798843
