Title :
Design and fabrication of a high dynamic range image sensor in TFA technology
Author :
Bohm, M. ; Lule, T. ; Fischer, H. ; Schulte, J. ; Schneider, B. ; Benthien, S. ; Blecher, F. ; Coors, S. ; Eckhardt, A. ; Keller, H. ; Rieve, P. ; Seibel, K. ; Sommer, M. ; Sterzel, J.
Author_Institution :
Inst. fur Halbleiterelektronik, Siegen Univ., Germany
Abstract :
Image sensors in TFA (Thin Film on ASIC) technology are composed of amorphous silicon (a-Si:H) thin film detectors on top of crystalline ASICs. A TFA prototype for automotive vision systems is presented which allows each pixel to adapt its individual sensitivity to the local illumination. By this means, a dynamic range of 120 dB minimum along with high local contrast is achieved. The ASICs were fabricated in a 0.7 /spl mu/m CMOS technology.
Keywords :
CMOS integrated circuits; amorphous semiconductors; application specific integrated circuits; elemental semiconductors; hydrogen; image sensors; semiconductor thin films; silicon; 0.7 micron; CMOS technology; Si:H; TFA technology; Thin Film on ASIC technology; a-Si:H thin film detectors; adaptive sensitivity; amorphous silicon; automotive vision systems; crystalline ASICs; fabrication; high dynamic range image sensor; local illumination; Amorphous silicon; Application specific integrated circuits; CMOS technology; Crystallization; Detectors; Dynamic range; Fabrication; Image sensors; Semiconductor thin films; Thin film sensors;
Conference_Titel :
VLSI Circuits, 1998. Digest of Technical Papers. 1998 Symposium on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-4766-8
DOI :
10.1109/VLSIC.1998.688083
