Design and fabrication of a high dynamic range image sensor in TFA technology

Author

Bohm, M. ; Lule, T. ; Fischer, H. ; Schulte, J. ; Schneider, B. ; Benthien, S. ; Blecher, F. ; Coors, S. ; Eckhardt, A. ; Keller, H. ; Rieve, P. ; Seibel, K. ; Sommer, M. ; Sterzel, J.

Author_Institution

Inst. fur Halbleiterelektronik, Siegen Univ., Germany

fYear

1998

fDate

11-13 June 1998

Firstpage

202

Lastpage

203

Abstract

Image sensors in TFA (Thin Film on ASIC) technology are composed of amorphous silicon (a-Si:H) thin film detectors on top of crystalline ASICs. A TFA prototype for automotive vision systems is presented which allows each pixel to adapt its individual sensitivity to the local illumination. By this means, a dynamic range of 120 dB minimum along with high local contrast is achieved. The ASICs were fabricated in a 0.7 /spl mu/m CMOS technology.

Keywords

CMOS integrated circuits; amorphous semiconductors; application specific integrated circuits; elemental semiconductors; hydrogen; image sensors; semiconductor thin films; silicon; 0.7 micron; CMOS technology; Si:H; TFA technology; Thin Film on ASIC technology; a-Si:H thin film detectors; adaptive sensitivity; amorphous silicon; automotive vision systems; crystalline ASICs; fabrication; high dynamic range image sensor; local illumination; Amorphous silicon; Application specific integrated circuits; CMOS technology; Crystallization; Detectors; Dynamic range; Fabrication; Image sensors; Semiconductor thin films; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Circuits, 1998. Digest of Technical Papers. 1998 Symposium on

Conference_Location

Honolulu, HI, USA

Print_ISBN

0-7803-4766-8

Type

conf

DOI

10.1109/VLSIC.1998.688083

Filename

688083