DocumentCode
296329
Title
Surface passivation of InP-based In0.53Ga0.47As quantum wires using silicon interlayer-based passivation technique
Author
Fujikura, Hajime ; Kodama, Satoshi ; Hasegawa, Hideki
Author_Institution
Graduate Sch. of Electron. & Inf. Eng., Hokkaido Univ., Sapporo, Japan
fYear
1996
fDate
21-25 Apr 1996
Firstpage
323
Lastpage
326
Abstract
Applicability of the Si interface control layer (ICL) based passivation technique to compound semiconductor quantum structures was investigated by using In0.53Ga0.47As wires formed by selective MBE growth. Photoluminescence (PL) intensity from the quantum wires (QWRs) reduced rapidly with reducing the well-to-surface distance tws. This PL reduction can be explained in terms of the carrier loss due to the rapid nonradiative recombination process at the surfaces. By applying the Si ICL-based passivation process to the wires, the PL reduction was effectively suppressed and a nearly complete recovery of PL intensity can be achieved, showing a maximum recovery factor of the PL intensity of 250. The recovery of PL intensity is due to reduction of interface state densities by Si ICL process which realizes reasonably ordered and coherent interface structures as indicated by XPS analysis
Keywords
III-V semiconductors; X-ray photoelectron spectra; gallium arsenide; indium compounds; interface states; interface structure; passivation; photoemission; photoluminescence; semiconductor quantum wires; silicon; In0.53Ga0.47As; InP; InP-based In0.53Ga0.47As quantum wires; Si; Si interlayer-based passivation technique; XPS analysis; carrier loss; interface control layer; interface state densities; interface structures; maximum recovery factor; photoluminescence; rapid nonradiative recombination process; selective MBE growth; surface passivation; Chemical vapor deposition; Indium compounds; Indium gallium arsenide; Molecular beam epitaxial growth; Passivation; Scanning electron microscopy; Silicon; Substrates; Temperature measurement; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location
Schwabisch-Gmund
Print_ISBN
0-7803-3283-0
Type
conf
DOI
10.1109/ICIPRM.1996.492044
Filename
492044
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