Fabrication of monolithic integration of 1.55 μm QW laser and HBT

Author

Yu-dong, Li ; Hong-bo, Sun ; Yi, Dong ; Qing-ming, Zeng ; Ke-li, Cai ; Yi-ding, Wang ; Shi-yong, Liu

Author_Institution

State Key Lab. on Integrated Optoelectron., Jilin Univ., Changchun, China

fYear

1996

fDate

21-25 Apr 1996

Firstpage

360

Lastpage

363

Abstract

We report in this paper a novel structural monolithic integration of a 1.55 μm multiquantum well (MQW) LD and a heterojunction bipolar transistor (HBT) and try a new simplified technology. By using of the substitutional Si₃O₄ isolating film we realized the p-type self-aligned contact metals of the ridge waveguide MQW lasers. And also the base metal to emitter mesa in heterojunction bipolar transistors has been finished by utilizing the self-aligned processes. We have obtained the MQW lasers and HBTs on the same InP substrate. The threshold current of about 20 mA of the MQW laser and the DC amplifier factor of about 70 in the HBT have been achieved

Keywords

III-V semiconductors; heterojunction bipolar transistors; indium compounds; integrated optoelectronics; monolithic integrated circuits; optical fibre communication; optical planar waveguides; optical transmitters; quantum well lasers; ridge waveguides; 1.55 micrometre; 20 mA; DC amplifier factor; HBT; InP; OEICs; QW laser; heterojunction bipolar transistor; monolithic integration; multiquantum well LD; optical fibre communications; p-type self-aligned contact metals; ridge waveguide; self-aligned processes; substitutional isolating film; threshold current; Heterojunction bipolar transistors; Indium phosphide; Isolation technology; Monolithic integrated circuits; Optical device fabrication; Quantum well devices; Semiconductor films; Substrates; Threshold current; Waveguide lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on

Conference_Location

Schwabisch-Gmund

Print_ISBN

0-7803-3283-0

Type

conf

DOI

10.1109/ICIPRM.1996.492257

Filename

492257