Title :
Piezoelectric thin film stress sensors for metal-forming operations
Author :
Fayfield, Ty ; Scott, Vernon ; Robbins, W.P. ; Ramalingam, S. ; Klamacki, B. ; Li, Maocheng
Author_Institution :
Minnesota Univ., Minneapolis, MN, USA
Abstract :
Sensor arrays are being developed to determine the friction distribution of the die (metal-working tool)-work material interface during metal forming operations. The basic element of the sensors are thin films of piezoelectric ZnO and AlN. Normal (compressive) stress sensors use films having their C-axis normal to their interface and shear-stress sensors use films having their C-axis ideally (for zero compressional stress response) inclined at 40° to the interface normal. The details of the RF-diode sputter deposition of the films and the characterization of the piezoelectric properties of the films are described. A prototype multi-element normal stress sensor having 125-μm feature size has been fabricated on a silicon wafer, and preliminary test results are described
Keywords :
aluminium compounds; forming processes; piezoelectric thin films; piezoelectric transducers; sputter deposition; stress analysis; ultrasonic materials testing; zinc compounds; AlN; RF-diode sputter deposition; Si; ZnO; die; friction distribution; metal forming operations; normal stress sensor; piezoelectric properties; thin film stress sensors; Compressive stress; Friction; Inorganic materials; Piezoelectric films; Prototypes; Sensor arrays; Sensor phenomena and characterization; Sputtering; Thin film sensors; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1989. Proceedings., IEEE 1989
Conference_Location :
Montreal, Que.
DOI :
10.1109/ULTSYM.1989.67177
