Title :
MEMS relative pressure sensor on flexible substrate
Author :
Ahmed, Moinuddin ; Butler, Donald P. ; Butler, Zeynep-Celik
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
Abstract :
The fabrication and characterization of micromachined, piezoresistive, relative pressure sensors sandwiched between flexible polyimide layers is described. This work is motivated by the need to monitor force and pressure on nonplanar surfaces for structural health monitoring. 35-nm-thick nichrome (Ni-80%/Cr-20%) is used as a sensing material for the pressure sensor. The average value of the gauge factor of the nichrome was found to be 1.75.
Keywords :
microfabrication; microsensors; pressure sensors; MEMS relative pressure sensor; flexible polyimide layers; flexible substrate; micromachined; piezoresistive; Electrical resistance measurement; Piezoresistive devices; Polyimides; Pressure measurement; Resistance; Substrates; Voltage measurement;
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
Print_ISBN :
978-1-4244-9290-9
DOI :
10.1109/ICSENS.2011.6126932
