Title :
Consideration on the optimum conditions to produce micromechanical parts by photo polymerization using direct focused beam writing
Author :
Yamaguchi, Kutsumi ; Nakamoto, Tukeshi ; Abraha, A. Petros
Author_Institution :
Dept. of Mech. Eng., Nagoya Univ., Japan
Abstract :
This research work deals with the development of a simple and practical method for manufacturing micromechanical parts. In this method, high aspect ratio polymer structures and stacked three dimensional polymer structures are produced using a direct focused UV laser beam writing on the surface of liquid photopolymer. The irradiated portion of the photopolymer is solidified and it becomes a polymer structure. The accuracy of the solidified polymer is examined and the optimum conditions to produce high aspect ratio and stacked three dimensional micro polymer structures are verified. Examples of structures that have been produced using the methods described are shown
Keywords :
laser materials processing; micromachining; micromechanical devices; photochemistry; photolithography; polymerisation; polymers; UV laser beam writing; direct focused beam writing; high aspect ratio polymer structures; liquid photopolymer surface; micromechanical parts; micromoulds; micropolymer structures; optimum conditions; photopolymerization; solidified polymer; stacked three dimensional polymer structures; Laser beams; Laser modes; Laser theory; Manufacturing; Micromechanical devices; Polymers; Semiconductor device manufacture; Shape; Surface emitting lasers; Writing;
Conference_Titel :
Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-2676-8
DOI :
10.1109/MHS.1995.494220
