Consideration on the optimum conditions to produce micromechanical parts by photo polymerization using direct focused beam writing

Author

Yamaguchi, Kutsumi ; Nakamoto, Tukeshi ; Abraha, A. Petros

Author_Institution

Dept. of Mech. Eng., Nagoya Univ., Japan

fYear

1995

fDate

4-6 Oct 1995

Firstpage

71

Lastpage

76

Abstract

This research work deals with the development of a simple and practical method for manufacturing micromechanical parts. In this method, high aspect ratio polymer structures and stacked three dimensional polymer structures are produced using a direct focused UV laser beam writing on the surface of liquid photopolymer. The irradiated portion of the photopolymer is solidified and it becomes a polymer structure. The accuracy of the solidified polymer is examined and the optimum conditions to produce high aspect ratio and stacked three dimensional micro polymer structures are verified. Examples of structures that have been produced using the methods described are shown

Keywords

laser materials processing; micromachining; micromechanical devices; photochemistry; photolithography; polymerisation; polymers; UV laser beam writing; direct focused beam writing; high aspect ratio polymer structures; liquid photopolymer surface; micromechanical parts; micromoulds; micropolymer structures; optimum conditions; photopolymerization; solidified polymer; stacked three dimensional polymer structures; Laser beams; Laser modes; Laser theory; Manufacturing; Micromechanical devices; Polymers; Semiconductor device manufacture; Shape; Surface emitting lasers; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-2676-8

Type

conf

DOI

10.1109/MHS.1995.494220

Filename

494220