Automatic pattern inspection for multilayer ceramic package

Two types of automatic inspection systems are needed to achieve the optimal inspection environment for manufacturing high-volume multilayer ceramic substrates. Diagnostic systems with flexibility, which are adaptable to process and product changes, are most useful at the earlier product development stage. In the manufacturing environment, where the process parameters are stable, emphasis is on inspection speed. A diagnostic system is described to illustrate the essential components of an automatic pattern inspection system. The test methodology used to characterize the inspection system quantitatively is discussed, and test results are reported. The use of this system for multilayer ceramic product application is also discussed