Title :
Humidity sensing properties of the sensor based on graphene oxide films with different dispersion concentrations
Author :
Zhao, Cheng-Long ; Qin, Ming ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
This paper presents the humidity sensing properties of the sensor based on graphene oxide (GO) films with different dispersion concentrations. A CMOS interdigital capacitance was used as the basic structure. The relationship between the sensing properties and dispersion concentrations is studied, by dripping four GO dispersions of different concentrations on the sensing area of the sensor chip, which was then baked for 2 hours at 50 °C. The measured results imply that the sensor based on GO films with proper concentration shows monotonic relationship between the sensing capacitance and relative humidity, and is of fast response and good repeatability.
Keywords :
CMOS integrated circuits; capacitive sensors; graphene; humidity sensors; thin film sensors; CMOS interdigital capacitance; CO; dispersion concentrations; graphene oxide films; humidity sensing properties; humidity sensors; relative humidity; sensor chip; temperature 50 degC; time 2 h; CMOS integrated circuits; Capacitance; Dispersion; Films; Humidity; Sensors;
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
Print_ISBN :
978-1-4244-9290-9
DOI :
10.1109/ICSENS.2011.6126968
