DocumentCode
2965950
Title
Polymer microcantilevers for thermal sensing
Author
Hodge, Lucy A Williamson ; Dunn, Richard J. ; Ibbotson, Robert H. ; Huq, S.E. ; Kar, Ajoy K.
Author_Institution
Micro & Nanotechnol. Centre, STFC, Oxford, UK
fYear
2011
fDate
28-31 Oct. 2011
Firstpage
671
Lastpage
674
Abstract
We present a polymer thermal bimorph microcantilever with integrated gold actuator and sensor. Our device reports an enhanced direct thermal response, and 30% increase in sensitivity compared to prior devices using NiChrome sensor. Releasing the cantilever from the substrate enhanced the response by a factor of 200, suggesting this technique to be advantageous over embedded `hot wire´ methods for sensing fluid thermal properties.
Keywords
cantilevers; gold; microactuators; microsensors; piezoresistive devices; polymers; resistors; temperature sensors; Au; NiChrome sensor; embedded hot wire method; fluid thermal sensing property; integrated gold actuator; integrated gold piezoresistor; integrated gold sensor; polymer thermal bimorph microcantilever; thermal response; Conductivity; Heating; Polyimides; Resistance; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2011 IEEE
Conference_Location
Limerick
ISSN
1930-0395
Print_ISBN
978-1-4244-9290-9
Type
conf
DOI
10.1109/ICSENS.2011.6126976
Filename
6126976
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