Title :
AC-DC thermal converter with IR-transmissive fiber coupling
Author :
Katzmann, F.L. ; Klonz, M.
Author_Institution :
Montclair Sci. Instrum., Cedar Grove, NJ, USA
Abstract :
Single heater thermal converters and dual heater isothermal converters are realized by depositing thin-film heaters on thin dielectric membranes on a silicon chip and by remotely sensing their temperature with radiation sensors through infrared transmissive fibers. This reduces diversion of heat from the heaters as well as minimizing heater signal coupling to the sensors. The use of infrared transmissive fibers to couple the thermal energy from the heater to the radiation sensor, permits sensing the temperature directly above the heater. Distributed fibers permit collection of the radiation from the entire surface of the heater, and to design the heater for optimum frequency response.
Keywords :
convertors; distributed sensors; fibre optic sensors; optical fibre couplers; radiometry; temperature sensors; thermopiles; transfer standards; voltage measurement; AC-DC thermal converter; IR-transmissive fiber coupling; Joule heat; distributed fibers; dual heater isothermal converters; fiber cable; optimum frequency response; radiation sensors; remote temperature sensing; silicon chip; single heater thermal converters; thermal energy coupling; thermopile detector; thin dielectric membranes; thin-film heaters; Analog-digital conversion; Dielectric thin films; Infrared heating; Infrared sensors; Isothermal processes; Optical fiber sensors; Semiconductor thin films; Sputtering; Temperature sensors; Thermal sensors;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.700032