DocumentCode
2966916
Title
AC-DC thermal converter with IR-transmissive fiber coupling
Author
Katzmann, F.L. ; Klonz, M.
Author_Institution
Montclair Sci. Instrum., Cedar Grove, NJ, USA
fYear
1998
fDate
6-10 July 1998
Firstpage
514
Lastpage
515
Abstract
Single heater thermal converters and dual heater isothermal converters are realized by depositing thin-film heaters on thin dielectric membranes on a silicon chip and by remotely sensing their temperature with radiation sensors through infrared transmissive fibers. This reduces diversion of heat from the heaters as well as minimizing heater signal coupling to the sensors. The use of infrared transmissive fibers to couple the thermal energy from the heater to the radiation sensor, permits sensing the temperature directly above the heater. Distributed fibers permit collection of the radiation from the entire surface of the heater, and to design the heater for optimum frequency response.
Keywords
convertors; distributed sensors; fibre optic sensors; optical fibre couplers; radiometry; temperature sensors; thermopiles; transfer standards; voltage measurement; AC-DC thermal converter; IR-transmissive fiber coupling; Joule heat; distributed fibers; dual heater isothermal converters; fiber cable; optimum frequency response; radiation sensors; remote temperature sensing; silicon chip; single heater thermal converters; thermal energy coupling; thermopile detector; thin dielectric membranes; thin-film heaters; Analog-digital conversion; Dielectric thin films; Infrared heating; Infrared sensors; Isothermal processes; Optical fiber sensors; Semiconductor thin films; Sputtering; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-5018-9
Type
conf
DOI
10.1109/CPEM.1998.700032
Filename
700032
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