DocumentCode :
296780
Title :
Improvement in power durability of SAW filters
Author :
Nishihara, T. ; Uchishiba, H. ; Matsuda, T. ; Ikata, O. ; Satoh, Y.
Author_Institution :
Fujitsu Labs. Ltd., Akashi, Japan
Volume :
1
fYear :
1995
fDate :
7-10 Nov 1995
Firstpage :
383
Abstract :
This paper describes the improvement in power durability of SAW filters in terms of filter designs and electrode materials. In this study, we used the previously reported ladder-type filter composed of one-port SAW resonators. For filter design, short aperture length and reduction of resonant resistance improved power durability. We clarified the frequency dependence of chip temperature and lifetime in a ladder-type filter. For electrode materials, Cu sandwiched film has high power durability. This is caused by stone-wall-like structure and alloy formation in intermediate layers. The optimum Cu quantity for multi-layered film was significant for high power durability
Keywords :
ladder filters; surface acoustic wave resonator filters; Cu; Cu sandwiched film; SAW filter; alloy formation; aperture length; chip temperature; design; electrode material; frequency dependence; ladder-type filter; lifetime; multilayered film; one-port SAW resonator; power durability; resonant resistance; stone-wall-like structure; Apertures; Electrodes; Fingers; Frequency; Magnetic separation; Piezoelectric films; Resonator filters; SAW filters; Surface acoustic waves; Temperature dependence;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
ISSN :
1051-0117
Print_ISBN :
0-7803-2940-6
Type :
conf
DOI :
10.1109/ULTSYM.1995.495603
Filename :
495603
Link To Document :
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