Title :
Two optical beams method for the SAW velocity measurements in anisotropic structures
Author :
Kolosovsky, E.A. ; Tsarev, A.V. ; Yakovkin, I.B.
Author_Institution :
Inst. of Semicond. Phys., Nivosibirsk, Russia
Abstract :
We present detailed investigations of a novel interferometric method for measuring the surface acoustic wave (SAW) velocity, based on diffraction of two optical beams on SAW. The method advantages are high accuracy, availability and opportunity of simultaneous measurement of the phase and the group velocities of SAW, and their dispersion. The experimental error for the phase and the group SAW velocity measuring is estimated as 0.5 m/s and 3 m/s, respectively
Keywords :
acoustic wave velocity measurement; interdigital transducers; light interferometry; surface acoustic wave transducers; surface acoustic waves; SAW velocity measurements; anisotropic structures; dispersion; group velocities; interferometric method; optical beam diffraction; phase velocity; two optical beams method; Acoustic diffraction; Acoustic measurements; Acoustic waves; Optical beams; Optical diffraction; Optical interferometry; Optical surface waves; Phase measurement; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495608
