Two optical beams method for the SAW velocity measurements in anisotropic structures

Author

Kolosovsky, E.A. ; Tsarev, A.V. ; Yakovkin, I.B.

Author_Institution

Inst. of Semicond. Phys., Nivosibirsk, Russia

Volume

1

fYear

1995

fDate

7-10 Nov 1995

Firstpage

405

Abstract

We present detailed investigations of a novel interferometric method for measuring the surface acoustic wave (SAW) velocity, based on diffraction of two optical beams on SAW. The method advantages are high accuracy, availability and opportunity of simultaneous measurement of the phase and the group velocities of SAW, and their dispersion. The experimental error for the phase and the group SAW velocity measuring is estimated as 0.5 m/s and 3 m/s, respectively

Keywords

acoustic wave velocity measurement; interdigital transducers; light interferometry; surface acoustic wave transducers; surface acoustic waves; SAW velocity measurements; anisotropic structures; dispersion; group velocities; interferometric method; optical beam diffraction; phase velocity; two optical beams method; Acoustic diffraction; Acoustic measurements; Acoustic waves; Optical beams; Optical diffraction; Optical interferometry; Optical surface waves; Phase measurement; Surface acoustic waves; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495608

Filename

495608