Title :
Dynamic FEM analysis of multiple cMUT cells in immersion [capacitive micromachined ultrasonic transducers]
Author :
Bayram, Baris ; Yaralioglu, Goksen G. ; Ergun, Arif Sanli ; Oralkan, Ömer ; Khuri-Yakub, Butrus T.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
This paper reports on the accurate modeling of immersion capacitive micromachined ultrasonic transducers (cMUTs) using a time-domain, nonlinear FEM package. A cMUT device consists of many cells. In this paper, a square membrane was used as the unit cell to cover the transducer area by periodic replication on the surface. The FEM calculations were used to analyze the nonlinear operation regimes of the cMUT. Nonlinear operation regimes (collapsed and collapse-snapback) provided higher acoustic output pressures than the conventional operation. The FEM calculations were compared to transmit experiment results performed with a hydrophone, and good agreement was observed.
Keywords :
capacitive sensors; finite element analysis; hydrophones; membranes; micromechanical devices; ultrasonic transducers; acoustic output pressure; collapse-snapback operation mode; collapsed operation mode; dynamic FEM analysis; hydrophone; immersion capacitive micromachined ultrasonic transducers; multiple cMUT cells; nonlinear operation regimes; square membrane unit cell; time-domain nonlinear FEM; Acoustic pulses; Acoustic waves; Biomembranes; Electrodes; Finite element methods; Insulation; Packaging; Silicon; Ultrasonic transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1417714