DocumentCode :
2967973
Title :
Dynamic FEM analysis of multiple cMUT cells in immersion [capacitive micromachined ultrasonic transducers]
Author :
Bayram, Baris ; Yaralioglu, Goksen G. ; Ergun, Arif Sanli ; Oralkan, Ömer ; Khuri-Yakub, Butrus T.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Volume :
1
fYear :
2004
fDate :
23-27 Aug. 2004
Firstpage :
252
Abstract :
This paper reports on the accurate modeling of immersion capacitive micromachined ultrasonic transducers (cMUTs) using a time-domain, nonlinear FEM package. A cMUT device consists of many cells. In this paper, a square membrane was used as the unit cell to cover the transducer area by periodic replication on the surface. The FEM calculations were used to analyze the nonlinear operation regimes of the cMUT. Nonlinear operation regimes (collapsed and collapse-snapback) provided higher acoustic output pressures than the conventional operation. The FEM calculations were compared to transmit experiment results performed with a hydrophone, and good agreement was observed.
Keywords :
capacitive sensors; finite element analysis; hydrophones; membranes; micromechanical devices; ultrasonic transducers; acoustic output pressure; collapse-snapback operation mode; collapsed operation mode; dynamic FEM analysis; hydrophone; immersion capacitive micromachined ultrasonic transducers; multiple cMUT cells; nonlinear operation regimes; square membrane unit cell; time-domain nonlinear FEM; Acoustic pulses; Acoustic waves; Biomembranes; Electrodes; Finite element methods; Insulation; Packaging; Silicon; Ultrasonic transducers; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-8412-1
Type :
conf
DOI :
10.1109/ULTSYM.2004.1417714
Filename :
1417714
Link To Document :
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