The low power 3D-magnetotransistor based on CMOS technology

This article presents a 3D magnetotransistor for detecting magnetic field in three dimensions (B_X, B_Y, and B_Z) by relying on the difference between base and collector currents (ΔI_CB). This device used low biasing current. It was designed and fabricated using CMOS fabrication technology. The device structure consisted of one emitter, 4 collectors and 4 bases. LOCOS oxide was grown to surround the emitter area to limit lateral carrier loss, and therefore reducing the overall biasing current. The experiment showed that, at 0.2 mA of biasing current, the BX, BY and BZ direction sensitivity to magnetic field within the range of 0 - 400 mT are 0.05, 0.07 and 0.145 mV/mT, respectively.