Surface acoustic wave sensor for sensing acoustic properties of liquid

Author

Nomura, Tooru ; Takebayashi, Masaaki ; Furukawa, Shoji ; Obana, Mashiro

Author_Institution

Shibaura Inst. of Technol., Tokyo, Japan

Volume

1

fYear

1995

fDate

7-10 Nov 1995

Firstpage

547

Abstract

A delay line utilizing shear horizontal surface acoustic wave (SH-SAW) has been used for a sensing element of liquid phase sensor. SH-SAWs can propagate non-radiatively along liquid/solid interface. The delay line has been constructed on 36° YX LiNbO₃ substrate and the SH-SAW is excited on the substrate using interdigital transducers (IDT). The SH-SAW delay line is immersed in a sample liquid. The acoustic wave velocity and viscosity of liquids are measured using the SH-SAW delay line system. Results show that the method is very suitable for sensing liquid

Keywords

acoustic wave velocity measurement; surface acoustic wave delay lines; surface acoustic wave sensors; viscosity measurement; LiNbO₃; LiNbO₃ substrate; SH-SAW delay line; acoustic properties; acoustic wave velocity; interdigital transducer; liquid phase sensor; liquid/solid interface; nonradiative propagation; shear horizontal surface acoustic wave sensor; viscosity; Acoustic measurements; Acoustic propagation; Acoustic sensors; Acoustic transducers; Acoustic waves; Delay lines; Liquids; Solids; Surface acoustic waves; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495637

Filename

495637