Noise considerations on hybrid optical MEMS displacement sensors

Author

Hortschitz, Wilfried ; Kohl, Franz ; Sachse, Matthias ; Stifter, Michael ; Sauter, Thilo ; Steiner, Harald ; Schalko, Johannes ; Jachimowicz, Artur ; Keplinger, Franz

Author_Institution

Inst. for Integrated Sensor Syst., Wiener Neustadt, Austria

fYear

2011

fDate

28-31 Oct. 2011

Firstpage

363

Lastpage

366

Abstract

Light flux modulators based on micro-opto-electromechanical systems (MOEMS) enable high resolution displacement based inertial sensors. To unveil the resolution limiting mechanisms, we investigated the performance of modulators with a rectangular aperture design. The two major noise sources for such devices are the Brownian noise originating from the surrounding air and the noise emerging from the opto-electronic photodetector. The experimental data suggests that the noise equivalent displacement is determined by the transmitive aspect ratio of the aperture.

Keywords

displacement measurement; micro-optomechanical devices; microsensors; optical sensors; photodetectors; Brownian noise; MOEMS; high resolution displacement based inertial sensors; hybrid optical MEMS displacement sensors; light flux modulators; microoptoelectromechanical systems; noise considerations; noise equivalent displacement; optoelectronic photodetector; rectangular aperture design; Apertures; Light emitting diodes; Noise; Optical sensors; Photoconductivity; Phototransistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2011 IEEE

Conference_Location

Limerick

ISSN

1930-0395

Print_ISBN

978-1-4244-9290-9

Type

conf

DOI

10.1109/ICSENS.2011.6127083

Filename

6127083