DocumentCode :
296811
Title :
Modelling of a BAW to STW reciprocal coupler for combined bulk and surface modes resonators
Author :
Dulmet, Bernard ; Watchueng, Hemé
Author_Institution :
Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Volume :
1
fYear :
1995
fDate :
7-10 Nov 1995
Firstpage :
587
Abstract :
This paper presents a theoretical analysis of the dispersion equation of a BAW to STW reciprocal coupler. The analysis is based on the coupling of Modes model. We consider horizontal shear modes travelling either along the thickness or along Z´ direction at the surface of a singly rotated cut of a class 32 crystal. Coupling between both kinds of modes are created by purely sinusoidal corrugations. We use Brekhovskikh´s well-known expansion to project the boundary conditions in the coupler´s region onto the average plane of the corrugations. We propose a simple method to select Bloch´s partial waves required for a given ratio of SSBW wavelength to corrugation period. A quasi-analytic solution of the dispersion equation is derived when this ratio remains close to unity and three partial waves are considered. Corresponding numerical results are given. They show that in the case of a STW incident wave, reflection phenomena are very significant in compare with bulk scattering itself
Keywords :
bulk acoustic wave devices; dispersion relations; surface acoustic wave couplers; surface acoustic wave resonators; BAW to STW reciprocal coupler; Bloch partial waves; Brekhovskikh expansion; SSBW wavelength; STW incident wave; Z´ direction; boundary conditions; bulk scattering; class 32 crystal; combined bulk-surface mode resonators; corrugation period; dispersion equation; horizontal shear modes; modes model; partial waves; quasi-analytic solution; reflection phenomena; singly rotated cut; sinusoidal corrugations; Acoustic scattering; Boundary conditions; Corrugated surfaces; Equations; Frequency; Gratings; Rayleigh scattering; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
ISSN :
1051-0117
Print_ISBN :
0-7803-2940-6
Type :
conf
DOI :
10.1109/ULTSYM.1995.495645
Filename :
495645
Link To Document :
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