Fabrication and optical measurements of nanoscale meta-materials: terahertz and beyond

This paper reports on efforts to create fully left-handed meta-materials at multi-THz frequencies, detailed optical characterizations of various structures fabricated, and understanding to date of what the materials limitations are for making these structures smaller and smaller. Presently, authors are using CXRO´s nano-writer to create sub-micron structures with 60 nm smallest features. Present results on these and other nano-fabricated structures with resonance frequencies in the 100 THz and higher range.