• DocumentCode
    2969376
  • Title

    High overtone Bulk Acoustic Resonators built on single crystal stacks for sensors applications

  • Author

    Ballandras, S. ; Baron, T. ; Lebrasseur, E. ; Martin, G. ; Alzuaga, S. ; Friedt, J. -M ; Poncot, J.C. ; Guichard, C.

  • Author_Institution
    FEMTO-ST, UTBM, Besangon, France
  • fYear
    2011
  • fDate
    28-31 Oct. 2011
  • Firstpage
    516
  • Lastpage
    519
  • Abstract
    This paper describes the principles of single crystal LiNbO3/Quartz high overtone bulk resonators and their application to the development of compact sensors dedicated to temperature and stress measurements. Design approaches are presented and first experimental results demonstrating the operation of such sensors are reported.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; crystal resonators; lithium compounds; quartz; stress measurement; temperature sensors; LiNbO3-SiO2; bulk acoustic resonator; compact sensors; sensors application; single crystal high overtone bulk resonators; single crystal stack; stress measurement; temperature measurement; Assembly; Atmospheric measurements; Bonding; Materials; Particle measurements; Resonant frequency; Stress measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2011 IEEE
  • Conference_Location
    Limerick
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-9290-9
  • Type

    conf

  • DOI
    10.1109/ICSENS.2011.6127146
  • Filename
    6127146
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2969376