DocumentCode :
2969376
Title :
High overtone Bulk Acoustic Resonators built on single crystal stacks for sensors applications
Author :
Ballandras, S. ; Baron, T. ; Lebrasseur, E. ; Martin, G. ; Alzuaga, S. ; Friedt, J. -M ; Poncot, J.C. ; Guichard, C.
Author_Institution :
FEMTO-ST, UTBM, Besangon, France
fYear :
2011
fDate :
28-31 Oct. 2011
Firstpage :
516
Lastpage :
519
Abstract :
This paper describes the principles of single crystal LiNbO3/Quartz high overtone bulk resonators and their application to the development of compact sensors dedicated to temperature and stress measurements. Design approaches are presented and first experimental results demonstrating the operation of such sensors are reported.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal resonators; lithium compounds; quartz; stress measurement; temperature sensors; LiNbO3-SiO2; bulk acoustic resonator; compact sensors; sensors application; single crystal high overtone bulk resonators; single crystal stack; stress measurement; temperature measurement; Assembly; Atmospheric measurements; Bonding; Materials; Particle measurements; Resonant frequency; Stress measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
ISSN :
1930-0395
Print_ISBN :
978-1-4244-9290-9
Type :
conf
DOI :
10.1109/ICSENS.2011.6127146
Filename :
6127146
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2969376
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