DocumentCode :
2970456
Title :
Fuzzy clustering decision tree for classifying working wafers of ion implanter
Author :
Horng, Shih-Cheng ; Hsiao, Yu-Liang
Author_Institution :
Dept. of Comput. Sci. & Inf. Eng., Chaoyang Univ. of Technol., Taichung, Taiwan
fYear :
2009
fDate :
8-11 Dec. 2009
Firstpage :
703
Lastpage :
707
Abstract :
In this paper, we propose a fuzzy clustering decision tree (FCDT) for the classification problem with large number of classes and continuous attributes. A hierarchical clustering concept is introduced to achieve a finer fuzzy partition. The proposed clustering algorithm split the data set into leaf clusters using splitting attributes based on a separation matrix and fuzzy rules. The leaf clusters consisting of the data of more than one class will be further classified using the C4.5. We have successfully applied the FCDT to the classification problem of the working wafers in an ion implanter, and compared the classification results and the computation time with the existing software See5 and CART.
Keywords :
decision trees; fuzzy set theory; ion implantation; pattern classification; pattern clustering; C4.5 classification technique; C4.5 classification techniqueion implantation classification problem; fuzzy clustering decision tree; fuzzy partition; fuzzy rules; hierarchical clustering concept; ion implanter; leaf clusters; separation matrix; splitting attributes; working wafers classification; Chaos; Classification tree analysis; Clustering algorithms; Computational complexity; Computer science; Decision trees; Fuzzy set theory; Neural networks; Partitioning algorithms; Random variables; C4.5; Classification; decision tree; fuzzy clustering; ion implanter;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Engineering and Engineering Management, 2009. IEEM 2009. IEEE International Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-4869-2
Electronic_ISBN :
978-1-4244-4870-8
Type :
conf
DOI :
10.1109/IEEM.2009.5373235
Filename :
5373235
Link To Document :
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