• DocumentCode
    2970540
  • Title

    High temperature Pt/LGS SAW sensor: From theory to experiment

  • Author

    Aubert, T. ; Sarry, F. ; Elmazria, O. ; Assouar, B. ; Bouvot, L. ; Nicolay, P.

  • Author_Institution
    Inst. Jean Lamour, Nancy Univ., Vandoeuvre les Nancy, France
  • fYear
    2011
  • fDate
    28-31 Oct. 2011
  • Firstpage
    1632
  • Lastpage
    1635
  • Abstract
    This paper describes the use of a general purpose modified simulator, first developed by K. Hashimoto to determine a priori the device responses of the specify Pt/LGS Y-X structure. The parameters for the analysis are determined as a function of the electrode type (physical constants, thickness) and substrate. The simulation responses are analyzed and compared to the experimental results and we should conclude how effectively the modified simulator is applicable to assessing Pt/LGS Y-X device performances as a function of temperature.
  • Keywords
    electrodes; gallium compounds; lanthanum compounds; platinum; surface acoustic wave sensors; Pt-LaGaSiO2; Y-X structure; electrode type; high temperature SAW sensor; Electrodes; Materials; Software; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2011 IEEE
  • Conference_Location
    Limerick
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-9290-9
  • Type

    conf

  • DOI
    10.1109/ICSENS.2011.6127196
  • Filename
    6127196
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2970540