DocumentCode :
2971402
Title :
Arc plasma-assisted deposition of nanocrystalline coatings
Author :
Krysina, O.V. ; Koval, N.N. ; Ivanov, Y.F. ; Shugurov, V.V.
Author_Institution :
Inst. of High Current Electron., Tomsk, Russia
fYear :
2012
fDate :
2-7 Sept. 2012
Firstpage :
537
Lastpage :
540
Abstract :
The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.
Keywords :
nanofabrication; nanostructured materials; plasma deposited coatings; titanium compounds; vacuum arcs; TiN; modified ion plasma setup; multicomponent nanocrystalline coatings; structural phase state; titanium nitride-based coating characteristics; vacuum arc plasma-assisted deposition; Cathodes; Coatings; Plasmas; Substrates; Surface treatment; Vacuum arcs;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Discharges and Electrical Insulation in Vacuum (ISDEIV), 2012 25th International Symposium on
Conference_Location :
Tomsk
ISSN :
1093-2941
Print_ISBN :
978-1-4673-1263-9
Electronic_ISBN :
1093-2941
Type :
conf
DOI :
10.1109/DEIV.2012.6412574
Filename :
6412574
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2971402
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