DocumentCode
2971402
Title
Arc plasma-assisted deposition of nanocrystalline coatings
Author
Krysina, O.V. ; Koval, N.N. ; Ivanov, Y.F. ; Shugurov, V.V.
Author_Institution
Inst. of High Current Electron., Tomsk, Russia
fYear
2012
fDate
2-7 Sept. 2012
Firstpage
537
Lastpage
540
Abstract
The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.
Keywords
nanofabrication; nanostructured materials; plasma deposited coatings; titanium compounds; vacuum arcs; TiN; modified ion plasma setup; multicomponent nanocrystalline coatings; structural phase state; titanium nitride-based coating characteristics; vacuum arc plasma-assisted deposition; Cathodes; Coatings; Plasmas; Substrates; Surface treatment; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum (ISDEIV), 2012 25th International Symposium on
Conference_Location
Tomsk
ISSN
1093-2941
Print_ISBN
978-1-4673-1263-9
Electronic_ISBN
1093-2941
Type
conf
DOI
10.1109/DEIV.2012.6412574
Filename
6412574
Link To Document