Title :
Research on manufacturing aluminum nitride powder by reduction
Author :
Jiduo, Cai ; Anbing, Huang ; Song, Cui ; Langping, Li ; Weiping, Wang ; Lijun, Ren
Author_Institution :
Huadong Res. Inst. of Microelectron. Technol., China
Abstract :
A process for preparing aluminum nitride powder by reduction of high-purity alumina with high-purity carbon in a nitrogen furnace at high temperature is discussed. Characteristics of the powder are: chemical composition (wt.%): N=33.4%, O=0.95%, C=0.2-0.3%, Si=15 p.p.m., Fe=2 p.p.m.; pure AlN crystals; 50 wt.% particle size is 0.66 μm; specific surface area is 1.82 m2-g-1. AlN ceramic substrates with improved thermal conductivity have been manufactured using this aluminum nitride powder
Keywords :
aluminium compounds; ceramics; powder technology; powders; reduction (chemical); substrates; 0.66 micron; 1660 degC; Al2O3 reduction; AlN powder; N furance; ceramic substrates; high purity C; high temperature; high-purity alumina; materials preparation; particle size; thermal conductivity; Aluminum nitride; Ceramics; Chemicals; Crystals; Furnaces; Manufacturing; Nitrogen; Powders; Temperature; Thermal conductivity;
Conference_Titel :
Electronic Components Conference, 1989. Proceedings., 39th
Conference_Location :
Houston, TX
DOI :
10.1109/ECC.1989.77856
