DocumentCode :
2972279
Title :
Properties of a room temperature terahertz detection array
Author :
Klaassen, T.O. ; Adam, A.J.L. ; Kasalynas, I. ; Hovenier, J.N. ; Pandraud, G. ; Iordanov, V.P. ; Sarro, P.M.
Author_Institution :
Kavli Inst. of NanoScience Delft, Delft Univ. of Technol., Netherlands
Volume :
2
fYear :
2005
fDate :
19-23 Sept. 2005
Firstpage :
467
Abstract :
An 8×8 pixel array has been designed and fabricated for broadband THz detection. Each pixel consists of a 500×500 μm thin film absorber on a SiN membrane with thermopile temperature readout. The expected performances - NEP = 4.10-9 W/Hz12/ and 10 ms response time - were compared with test results.
Keywords :
silicon compounds; submillimetre wave detectors; thermopiles; thin film devices; 10 ms; SiN; broadband terahertz detection; terahertz detection array; thermopile temperature readout; thin film absorber; Absorption; Biomembranes; CMOS technology; Detectors; Instruments; Materials science and technology; Pyroelectricity; Semiconductor films; Silicon compounds; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005. IRMMW-THz 2005. The Joint 30th International Conference on
Print_ISBN :
0-7803-9348-1
Type :
conf
DOI :
10.1109/ICIMW.2005.1572615
Filename :
1572615
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2972279
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