Dynamic characteristics of aerostatic bearings in nano-precision stage

Author

Ye Yixi ; Chen Xuedong ; Luo Xin

Author_Institution

State Key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China

fYear

2009

fDate

22-24 June 2009

Firstpage

1050

Lastpage

1055

Abstract

In this paper, the dynamical performance of nano-precision stage with an annular aerostatic bearing and vacuum preload has been investigated. A method of calculating the load capacity, stiffness and damping of aerostatic bearings is proposed. Then, it is discussed that how different design and working conditions of aerostatic bearings affects the dynamical performance of nano-precision stage. It is concluded that orifice diameter, air-gap clearance and supply pressure influence the dynamical performance of precision stage great. The natural frequencies of aerostatic bearings can avoid structure resonance and the working frequency of stage by designing bearing dimension and working conditions.

Keywords

damping; elastic constants; machine bearings; precision engineering; aerostatic bearings; damping; dynamical performance; nanoprecision stage; stiffness; Actuators; Aerodynamics; Air gaps; Automation; Damping; Employee welfare; Frequency; Friction; Manufacturing; Orifices;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Automation, 2009. ICIA '09. International Conference on

Conference_Location

Zhuhai, Macau

Print_ISBN

978-1-4244-3607-1

Electronic_ISBN

978-1-4244-3608-8

Type

conf

DOI

10.1109/ICINFA.2009.5205073

Filename

5205073