DocumentCode :
297301
Title :
OPTIMAL PULSE-MODULATOR DESIGN CRITERIA FOR PLASMA SOURCE ION IMPLANTERS
Author :
Reass, William
Volume :
1
fYear :
1993
fDate :
21-23 June 1993
Firstpage :
452
Keywords :
Implants; Ion beams; Plasma applications; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Pulse modulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
0-7803-1415-8
Type :
conf
DOI :
10.1109/PPC.1993.513372
Filename :
513372
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=297301
