DocumentCode
297301
Title
OPTIMAL PULSE-MODULATOR DESIGN CRITERIA FOR PLASMA SOURCE ION IMPLANTERS
Author
Reass, William
Volume
1
fYear
1993
fDate
21-23 June 1993
Firstpage
452
Keywords
Implants; Ion beams; Plasma applications; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Pulse modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location
Albuquerque, NM, USA
Print_ISBN
0-7803-1415-8
Type
conf
DOI
10.1109/PPC.1993.513372
Filename
513372
Link To Document