DocumentCode
297302
Title
TOTEM POLL DRIVE DECKS FOR THE HIGH-VOLTAGE, PULSED-POWER MODULATOR FOR A LARGE-SCALE PLASMA SOURCE
Author
Gribble, R.J. ; Reass, W.A.
Volume
1
fYear
1993
fDate
21-23 June 1993
Firstpage
456
Keywords
Ion implantation; Large-scale systems; Optical modulation; Plasma density; Plasma immersion ion implantation; Plasma sources; Pulse modulation; Pulse width modulation; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location
Albuquerque, NM, USA
Print_ISBN
0-7803-1415-8
Type
conf
DOI
10.1109/PPC.1993.513373
Filename
513373
Link To Document