DocumentCode :
297302
Title :
TOTEM POLL DRIVE DECKS FOR THE HIGH-VOLTAGE, PULSED-POWER MODULATOR FOR A LARGE-SCALE PLASMA SOURCE
Author :
Gribble, R.J. ; Reass, W.A.
Volume :
1
fYear :
1993
fDate :
21-23 June 1993
Firstpage :
456
Keywords :
Ion implantation; Large-scale systems; Optical modulation; Plasma density; Plasma immersion ion implantation; Plasma sources; Pulse modulation; Pulse width modulation; Switches; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
0-7803-1415-8
Type :
conf
DOI :
10.1109/PPC.1993.513373
Filename :
513373
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=297302
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