DocumentCode :
2973022
Title :
Bioinspired, uncooled chitin photomechanical sensor for thermal infrared sensing
Author :
Zhang, Nuo ; Cheng, Jim C. ; Warren, Clinton G. ; Pisano, Albert P.
Author_Institution :
Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, CA, USA
fYear :
2011
fDate :
28-31 Oct. 2011
Firstpage :
833
Lastpage :
836
Abstract :
We have designed and fabricated a novel, polymer-ceramic bimorph infrared (IR) sensing element for uncooled operations. The developed sensors utilize biopolymer chitin on ceramic beams, which deflect with changing temperature due to the mismatch in thermal expansion coefficients of the two materials. This is the first known instance of a polysaccharide-based material used in the development of IR sensors. To maximize the bi-material bending effect, a thin layer of chitin is deposited onto a stiff layer of polysilicon. As in nature, chitin makes an ideal absorbing layer for the sensors because of its high thermal expansion coefficient and natural vibrational resonances in the IR range. Experiments using finite element analysis (FEA) simulation showed that the sensitivity of the polymer-ceramic bimorph sensor was 50 times of the sensitivity of the commonly-used metal-ceramic bimorph sensor. The proposed device offers high sensitivity and significant cost savings compared to existing competitive technologies.
Keywords :
finite element analysis; infrared detectors; thermal expansion measurement; biopolymer chitin; ceramic beams; chitin photomechanical sensor; finite element analysis; polymer-ceramic bimorph infrared sensing element; polymer-ceramic bimorph sensor; thermal expansion coefficients; thermal infrared sensing; vibrational resonances; Polymers; Sensitivity; Temperature sensors; Thermal expansion;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
ISSN :
1930-0395
Print_ISBN :
978-1-4244-9290-9
Type :
conf
DOI :
10.1109/ICSENS.2011.6127320
Filename :
6127320
Link To Document :
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