DocumentCode
297303
Title
1KW X-PINCH SOFT X-RAY SOURCE POWERED BY A 500 KA, 100 NS, 40 PPS PULSER
Author
Glidden, S.C. ; Richter, M. ; Hammer, D.A. ; Kalantar, D.H.
Volume
1
fYear
1993
fDate
21-23 June 1993
Firstpage
459
Keywords
Costs; Microelectronics; Plasma materials processing; Plasma x-ray sources; Pulse measurements; Resists; Synchrotrons; Throughput; Wires; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location
Albuquerque, NM, USA
Print_ISBN
0-7803-1415-8
Type
conf
DOI
10.1109/PPC.1993.513374
Filename
513374
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