Electrical, dielectric and structural properties of MgO thin films deposited on single layer ZnO using chemical solution method

Author

Habibah, Z. ; Syafawati, N. ; Ismail, L.N. ; Bakar, R.A. ; Mamat, M.H. ; Rusop, M.

Author_Institution

Fac. of Electr. Eng., Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia

fYear

2012

fDate

24-27 June 2012

Firstpage

505

Lastpage

508

Abstract

The electrical, dielectric and structural properties of multilayer ZnO/MgO films prepared by simple chemical deposition technique were investigated using I-V measurement, impedance spectroscopy analyzer and field emission scanning electron microscope (FESEM). From the observation, it shows that the annealing temperature influence the electrical, dielectric and structural properties of ZnO/MgO multilayer films. Denser films and small particles are produced as the annealing temperature increase from 400°C to 500°C with 25°C interval.

Keywords

II-VI semiconductors; annealing; electrochemical impedance spectroscopy; field emission electron microscopy; insulating thin films; liquid phase deposition; magnesium compounds; multilayers; permittivity; scanning electron microscopy; semiconductor thin films; semiconductor-insulator boundaries; wide band gap semiconductors; zinc compounds; FESEM; I-V measurement; ZnO-MgO; annealing temperature; chemical solution method; dielectric constant; dielectric properties; electrical properties; field emission scanning electron microscopy; impedance spectroscopy analysis; multilayer; simple chemical deposition technique; single layer ZnO surface; structural properties; temperature 400 degC to 500 degC; thin films; Annealing; Conductivity; Dielectrics; Films; Nonhomogeneous media; Surface morphology; Zinc oxide; ZnO/MgO; annealing; dielectric properties; multilayer films; nanostructured;

fLanguage

English

Publisher

ieee

Conference_Titel

Humanities, Science and Engineering Research (SHUSER), 2012 IEEE Symposium on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4673-1311-7

Type

conf

DOI

10.1109/SHUSER.2012.6268883

Filename

6268883