The signal interrogation technology of MEMS optical fiber pressure sensor

Author

Wang Cong-fei ; Wang Guang-long ; Chen Jian-hui ; Yi, Dun

Author_Institution

Coll. of Mech. Eng., Inst. of Nanotechnol. & Microsyst., Shijiazhuang, China

fYear

2009

fDate

22-24 June 2009

Firstpage

1285

Lastpage

1288

Abstract

This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters.

Keywords

fibre optic sensors; light interferometry; microsensors; optical testing; pressure measurement; pressure sensors; MEMS optical fiber pressure sensor; component test system; fringe analysis; microelectromechanical system; self-calibrated interferometric intensity based system; signal interrogation technology; white-light interferometry system; Automatic testing; Microelectromechanical systems; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical interferometry; Sensor phenomena and characterization; Sensor systems; Signal processing; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Automation, 2009. ICIA '09. International Conference on

Conference_Location

Zhuhai, Macau

Print_ISBN

978-1-4244-3607-1

Electronic_ISBN

978-1-4244-3608-8

Type

conf

DOI

10.1109/ICINFA.2009.5205114

Filename

5205114