A double layer micro-bridge calorimeter

A novel double layer micro-bridge calorimeter structure is designed, in which an upper bridge suspends upon the lower one with its center membrane covering that of the lower one. This structure enables the self-align sputtering deposition of sample films with thickness of sub-micrometers easily without shadow mask. Finite element analyses simulation shows that this double layer calorimeter has the similar performance as the traditional micro-calorimeters, and the measurement error is less than 0.5 nJ/K and it can accurately measures the melting point of the sample film.