• DocumentCode
    2973543
  • Title

    Optimizing MOM diode performance via the oxidation technique

  • Author

    Dodd, Linzi E. ; Wood, David ; Gallant, Andrew J.

  • Author_Institution
    Sch. of Eng. & Comput. Sci., Durham Univ., Durham, UK
  • fYear
    2011
  • fDate
    28-31 Oct. 2011
  • Firstpage
    176
  • Lastpage
    179
  • Abstract
    This work presents a study of the effect of a simple oxidation technique on the electrical performance of Ti/TiOx/Pt MOM (metal-oxide-metal) diodes. A fabrication process has been designed to produce devices with a high yield. The I-V characteristics show good diode behavior: subsequent mathematical analysis to extract the key parameters of curvature coefficient and resistance at zero bias demonstrate how these numbers depend on the curve fitting method. Nevertheless, diodes with high curvature (typically 5.5 V-1 unbiased, 15 V-1 biased) represent results among the best to date. Complimentary physical information from the structures has been obtained via AFM and RBS analysis.
  • Keywords
    curve fitting; platinum; semiconductor diodes; titanium compounds; AFM analysis; I-V characteristics; MOM diode performance; RBS analysis; Ti-TiOx-Pt; curve fitting method; electrical performance; fabrication process; mathematical analysis; oxidation technique; zero bias; Fabrication; Gold; Oxidation; Polynomials; Resistance; Titanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2011 IEEE
  • Conference_Location
    Limerick
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-9290-9
  • Type

    conf

  • DOI
    10.1109/ICSENS.2011.6127347
  • Filename
    6127347
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2973543