DocumentCode
2973688
Title
pH sensing from frequency response of SGFET
Author
Kherrat, A. ; Le Bihan, F. ; Jacques, Emmanuel ; Thomas, Martyn ; De Sagazan, Olivier ; Crand, S. ; Mohammed-Brahim, T. ; Razan, F.
Author_Institution
IETR, Univ. of Rennes I, Rennes, France
fYear
2011
fDate
28-31 Oct. 2011
Firstpage
1089
Lastpage
1092
Abstract
This paper presents suspended gate field effect transistors (SGFET) used as highly sensitive pH sensors. The devices are there characterized in dynamic mode. The gain, measured versus frequency, is studied for different pH values and shows a resonance frequency depending on the pH value. These results, obtained with different geometries of SGFET, give an opportunity to develop new microsystems, CMOS compatible, highly sensitive to pH.
Keywords
CMOS integrated circuits; chemical sensors; field effect transistors; pH measurement; CMOS compatible; SGFET; frequency response; geometries; microsystems; pH sensing; suspended gate field effect transistors; FETs; Logic gates; Resonant frequency; Sensitivity; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2011 IEEE
Conference_Location
Limerick
ISSN
1930-0395
Print_ISBN
978-1-4244-9290-9
Type
conf
DOI
10.1109/ICSENS.2011.6127353
Filename
6127353
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