High Performance 3-D Helical RF Transformers

Author

Weon, Dae-Hee ; Mohammadi, Saeed

Author_Institution

Purdue Univ., West Lafayette

fYear

2007

fDate

3-8 June 2007

Firstpage

1897

Lastpage

1900

Abstract

We have designed, fabricated, and tested 3-dimensional helical RF transformers on high-resistivity Si substrate using stressed metal technology. The technology for these transformers is based on one step Cr/Au metal deposition and electroplating. These transformers exhibit high coupling coefficient and high power efficiency over an extended frequency range. A 4:4 turn ratio transformer in this work achieves a coupling coefficient k of 0.84 at 5 GHz, with k over 0.7 for frequencies from 1.6 to 6.6 GHz and with P_out/P_in over 75% up to 20 GHz.

Keywords

chromium alloys; electroplating; gold alloys; radiofrequency integrated circuits; transformers; 3D helical RF transformers; CrAu; electroplating; frequency 1.6 GHz to 6.6 GHz; metal deposition; stressed metal technology; Coupling circuits; Inductance; Inductors; Magnetic flux; Mutual coupling; Q factor; Radio frequency; Radiofrequency integrated circuits; Spirals; Transformers; High coupling coefficient; RF transformers; high frequency; high power efficiency; stressed metal technology; three dimensional fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium, 2007. IEEE/MTT-S International

Conference_Location

Honolulu, HI

ISSN

0149-645X

Print_ISBN

1-4244-0688-9

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2007.380143

Filename

4264232