• DocumentCode
    2974469
  • Title

    Issues in modeling, supervision, and fault detection for automated RTP systems

  • Author

    Awad, Hamdi A.

  • Author_Institution
    Fac. of Electron. Eng., Menoufia Univ., Shebin-ElKom, Egypt
  • fYear
    2009
  • fDate
    Sept. 29 2009-Oct. 2 2009
  • Firstpage
    1
  • Lastpage
    9
  • Abstract
    Event detectability is the corner stone of constructing reliable diagnosers for Petri net (PN) models. In some PN models, the transition firing sequences are not detectable based on their outputs and structural information only. This paper introduces a novel diagnoser to overcome such problems. The developed diagnoser depends not only on the output and the structural information of the PN models, but also on its associated marking vector. The main advantage of the proposed diagnoser is to evaluate the faulty states without checking event detectability and coverability trees of the discrete event systems. Issues for rapid thermal processing (RTP) modeling and supervision are also addressed in this paper. Early fault detection will minimize cost and processing time of the RTP systems, accordingly, this paper also develops a unified PN-based frame work for fault detection and isolation in these systems.
  • Keywords
    Petri nets; discrete event systems; fault diagnosis; process control; rapid thermal processing; semiconductor device manufacture; Petri net models; automated RTP systems; coverability trees; discrete event systems; event detectability; fault detection; fault isolation; rapid thermal processing; transition firing sequences; unified PN-based frame work; Automatic control; Discrete event systems; Electrical equipment industry; Event detection; Fault detection; Fault diagnosis; Industrial control; Petri nets; Power system modeling; Rapid thermal processing; Discrete Event Systems; Fault detection and Isolation; Petri nets; RTP;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Thermal Processing of Semiconductors, 2009. RTP '09. 17th International Conference on
  • Conference_Location
    Albany, NY
  • ISSN
    1944-0251
  • Print_ISBN
    978-1-4244-3814-3
  • Electronic_ISBN
    1944-0251
  • Type

    conf

  • DOI
    10.1109/RTP.2009.5373440
  • Filename
    5373440