Title :
Theoretical and experimental results of unidirectional interdigital transducers using grating SAW substrates and zero TCF ladder type filters at 2 GHz range
Author :
Yamanouchi, Kazuhiko ; Satoh, Yusuke
Author_Institution :
Tohoku Inst. of Technol., Sendai, Japan
Abstract :
Surface acoustic wave (SAW) filters employing unidirectional interdigital transducers (UDT) show low loss properties. We propose a new single phase unidirectional transducer (UDT) with about λ/4 electrode width for the best transducer efficiency. The new UDTs are obtained by IDT on a very thin dielectric grating or a very thin dielectric grating with λ/8 shifts. Good UDT properties are obtained for very thin SiO2 grating thickness (about 0.03 μm at 2 GHz with Al electrode thickness of 0.07 μm). We describe the experimental results of wide band and very low loss filters with under 1 dB insertion loss in the 2 GHz range. We also show ladder type SAW resonator filters using high coupling SiO2/5°Y-X LiNbO3 with zero temperature coefficients of frequency (TCF). The experimental results show under 1.6 dB insertion loss with a wide band and zero TCF in the 2 GHz range. Finally, we show the narrower band width of ladder type filters using the new configuration of IDTs and reflectors on high coupling substrates.
Keywords :
UHF filters; interdigital transducers; ladder filters; surface acoustic wave filters; surface acoustic wave resonator filters; 0.03 micron; 0.07 micron; 2 GHz; IDT; LiNbO3; SAW filters; SAW resonator filters; SiO2; dielectric grating; grating SAW substrates; insertion loss; ladder filters; lithium niobate; silica grating; single phase unidirectional transducer; surface acoustic wave filters; transducer efficiency; unidirectional interdigital transducers; zero temperature coefficients of frequency; Acoustic transducers; Acoustic waves; Dielectrics; Electrodes; Gratings; Insertion loss; Resonator filters; Surface acoustic waves; Temperature; Wideband;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418040