Title :
Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
Author :
Hashimoto, Seiji ; Ohishi, Kiyoshi ; Ohishi, Takuya ; Ishikawa, Takeo ; Kosaka, Koji ; Egashira, Yoshiya ; Kubota, Hajime ; Ohmi, Tadahiro
Author_Institution :
Dept. of Electron. Eng., Gunma Univ., Japan
Abstract :
This paper presents a friction model-based ultra-precision stage control that introduces the non-resonant ultrasonic motor (NRUSM). At first, the friction characteristic is experimentally evaluated as a function of the stage position. Next, the friction model is adopted for the proposed continuous-pass tracking control design, and then the efficiency of the model-based control is verified by positioning experiments. Finally, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed.
Keywords :
PI control; control system synthesis; position control; stiction; ultrasonic motors; continuous pass tracking control design; friction model; model based control; nonresonant ultrasonic motor; online identification method; static friction characteristics; ultra precision stage control; Control design; Control systems; Electromagnetic forces; Electron beams; Friction; Hysteresis motors; Magnetic noise; Rough surfaces; Surface roughness; Ultrasonic variables measurement;
Conference_Titel :
Advanced Motion Control, 2004. AMC '04. The 8th IEEE International Workshop on
Print_ISBN :
0-7803-8300-1
DOI :
10.1109/AMC.2004.1297929
