• DocumentCode
    2976743
  • Title

    Development of tapeless lead-on-chip (LOC) packaging process with i-line photosensitive polyimide

  • Author

    Amagai, Masazumi ; Saitoh, Tadashi ; Ohsumi, Masaki ; Kawasaki, Eui ; Yew, Chee Kiang ; Chye, Lim Thaim ; Toh, Jeffery ; Khim, Swee Yong

  • Author_Institution
    Texas Instrum., Oita, Japan
  • fYear
    1997
  • fDate
    13-15 Oct 1997
  • Firstpage
    237
  • Lastpage
    244
  • Abstract
    A double-sided adhesive tape is typically used as an insulator and mechanical buffer layer between the chip and lead frame in lead-on-chip (LOC) packages. The costs associated with the lead frame and tape process make the current LOC package more expensive than conventional packaging. A new tapeless LOC package process has been developed which significantly reduces the production costs. In this new process, the tape is replaced by a i-line photosensitive thermosetting polyimide layer coated on the passivation deposited wafer. This paper describes the optimum material properties for the polyimide, the fabrication process parameters, and the experimental and simulated reliability and performance results of the tapeless LOC package
  • Keywords
    adhesion; integrated circuit manufacture; integrated circuit packaging; integrated circuit reliability; passivation; photolithography; polymer films; fabrication process parameters; i-line photosensitive polyimide; lead frame; lead-on-chip packaging process; optimum material properties; passivation deposited wafer; production costs reduction; reliability; tapeless LOC packaging process; thermosetting polyimide layer; Buffer layers; Costs; Fabrication; Insulation; Lab-on-a-chip; Material properties; Packaging; Passivation; Polyimides; Production;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 1997., Twenty-First IEEE/CPMT International
  • Conference_Location
    Austin, TX
  • ISSN
    1089-8190
  • Print_ISBN
    0-7803-3929-0
  • Type

    conf

  • DOI
    10.1109/IEMT.1997.626924
  • Filename
    626924