DocumentCode
2976967
Title
P+ Polysilkm Emitters for Sub-O.5/spl mu/m High-Performance PNP
Author
Warnock, J. ; Sun, J.Y.C. ; Bhattacharya, Surya
Author_Institution
IBM Research Division, T.J. Watson Research Cneter
fYear
1992
fDate
21-24 June 1992
Keywords
BiCMOS integrated circuits; Cutoff frequency; Degradation; Design optimization; Dielectrics; Etching; Furnaces; Implants; Rapid thermal annealing; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location
Cambridge, MA, USA
Type
conf
DOI
10.1109/DRC.1992.671852
Filename
671852
Link To Document