Title :
Phase Noise Modelling in Parallel-plate MEMS variable capacitors
Author :
Lazaro, A. ; Girbau, D.
Author_Institution :
Dep. of Electron., Univ. Rovira i Virgili, Tarragona
Abstract :
A CAD electromechanical model for phase noise simulation has been developed; it allows the simulation of the mechanical and RF behaviour for electrostatic MEMS devices taking Brownian noise into consideration. The model is implemented in commercial circuit software (ADS-based). The model is applied to study the effect of MEMS varactors in oscillator phase noise. The model describes the important nonlinear effects in the low frequency phase noise introduced by Brownian noise in the MEMS suspended membrane.
Keywords :
capacitors; micromechanical devices; phase noise; ADS; Brownian noise; CAD electromechanical model; MEMS suspended membrane; MEMS varactors; commercial circuit software; electrostatic MEMS devices; nonlinear effects; oscillator phase noise; parallel-plate MEMS variable capacitors; phase noise modelling; phase noise simulation; Capacitors; Circuit noise; Circuit simulation; Electrostatics; Low-frequency noise; Microelectromechanical devices; Micromechanical devices; Phase noise; Radio frequency; Varactors;
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
DOI :
10.1109/SCED.2009.4800482
