Title :
Integration of a MEMS Capacitive Sensor in a Wireless Transmitter
Author :
Ramos, J. ; Luque, A. ; Quero, Jose M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Extremadura, Badajoz
Abstract :
The integration of multiple functionality in MEMS devices is explored in this paper. The goal of this approach is to maximize the integration level by simplifying the global system architecture. In this paper, a capacitive pressure sensor is also designed as a RF capacitor for radio telemetry. The experimental results validate this novel approach that opens new alternatives to single-device RF-sensor designs.
Keywords :
capacitive sensors; micromechanical devices; pressure sensors; radio transmitters; radiotelemetry; MEMS capacitive sensor; capacitive pressure sensor; global system architecture; radio telemetry; single-device RF-sensor designs; wireless transmitter; Capacitive sensors; Electrodes; Micromechanical devices; Pressure measurement; Radio frequency; Radiofrequency integrated circuits; Sensor systems and applications; Telemetry; Transmitters; Wireless sensor networks;
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
DOI :
10.1109/SCED.2009.4800499
