DocumentCode
2977891
Title
Integration of a MEMS Capacitive Sensor in a Wireless Transmitter
Author
Ramos, J. ; Luque, A. ; Quero, Jose M.
Author_Institution
Dept. of Electr. & Electron. Eng., Univ. of Extremadura, Badajoz
fYear
2009
fDate
11-13 Feb. 2009
Firstpage
330
Lastpage
333
Abstract
The integration of multiple functionality in MEMS devices is explored in this paper. The goal of this approach is to maximize the integration level by simplifying the global system architecture. In this paper, a capacitive pressure sensor is also designed as a RF capacitor for radio telemetry. The experimental results validate this novel approach that opens new alternatives to single-device RF-sensor designs.
Keywords
capacitive sensors; micromechanical devices; pressure sensors; radio transmitters; radiotelemetry; MEMS capacitive sensor; capacitive pressure sensor; global system architecture; radio telemetry; single-device RF-sensor designs; wireless transmitter; Capacitive sensors; Electrodes; Micromechanical devices; Pressure measurement; Radio frequency; Radiofrequency integrated circuits; Sensor systems and applications; Telemetry; Transmitters; Wireless sensor networks;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location
Santiago de Compostela
Print_ISBN
978-1-4244-2838-0
Electronic_ISBN
978-1-4244-2839-7
Type
conf
DOI
10.1109/SCED.2009.4800499
Filename
4800499
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