DocumentCode :
2977964
Title :
Towards Nano-Fin based Mercury-Sensors
Author :
Keller, Lars O. ; Kallis, Klaus T. ; Fieder, Horst L. ; Knoch, Joachim
Author_Institution :
Fac. of Electr. Eng., Tech. Univ. Dortmund, Dortmund
fYear :
2009
fDate :
11-13 Feb. 2009
Firstpage :
342
Lastpage :
344
Abstract :
With the here presented sensor-concept it is possible to produce a low-cost mercury-sensor, based on a lithography-independent structured poly-silicon nanometer-scale fin. Using the increase of electrical resistance of a gold-layer being exposed to mercury-vapor, the exposition to mercury resulting in the amalgamation of the gold-layer can be detected. Giving the ability of regeneration to the here presented sensor, the mercury must be driven out of the gold-layer which can be achieved by heating-up the layer to a temperature over 150degC. Shrinking the sensor to nanometer-dimensions gives the benefit of a small mass of gold, small dimensions of the sensor resulting in a good surface-area-to-volume-ratio (SAVR) and low-power consumption during regeneration-cycle.
Keywords :
chemical sensors; nanosensors; gold layer electrical resistance; lithography-independent structure; low-cost mercury-sensor; low-power consumption; nanofin based mercury-sensors; polysilicon nanometer-scale fin; surface-area-to-volume-ratio; Anisotropic magnetoresistance; Chemical analysis; Chemical sensors; Electric resistance; Etching; Gold; Lithography; Plasma applications; Plasma temperature; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
Type :
conf
DOI :
10.1109/SCED.2009.4800502
Filename :
4800502
Link To Document :
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