• DocumentCode
    2977964
  • Title

    Towards Nano-Fin based Mercury-Sensors

  • Author

    Keller, Lars O. ; Kallis, Klaus T. ; Fieder, Horst L. ; Knoch, Joachim

  • Author_Institution
    Fac. of Electr. Eng., Tech. Univ. Dortmund, Dortmund
  • fYear
    2009
  • fDate
    11-13 Feb. 2009
  • Firstpage
    342
  • Lastpage
    344
  • Abstract
    With the here presented sensor-concept it is possible to produce a low-cost mercury-sensor, based on a lithography-independent structured poly-silicon nanometer-scale fin. Using the increase of electrical resistance of a gold-layer being exposed to mercury-vapor, the exposition to mercury resulting in the amalgamation of the gold-layer can be detected. Giving the ability of regeneration to the here presented sensor, the mercury must be driven out of the gold-layer which can be achieved by heating-up the layer to a temperature over 150degC. Shrinking the sensor to nanometer-dimensions gives the benefit of a small mass of gold, small dimensions of the sensor resulting in a good surface-area-to-volume-ratio (SAVR) and low-power consumption during regeneration-cycle.
  • Keywords
    chemical sensors; nanosensors; gold layer electrical resistance; lithography-independent structure; low-cost mercury-sensor; low-power consumption; nanofin based mercury-sensors; polysilicon nanometer-scale fin; surface-area-to-volume-ratio; Anisotropic magnetoresistance; Chemical analysis; Chemical sensors; Electric resistance; Etching; Gold; Lithography; Plasma applications; Plasma temperature; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices, 2009. CDE 2009. Spanish Conference on
  • Conference_Location
    Santiago de Compostela
  • Print_ISBN
    978-1-4244-2838-0
  • Electronic_ISBN
    978-1-4244-2839-7
  • Type

    conf

  • DOI
    10.1109/SCED.2009.4800502
  • Filename
    4800502