Title :
Subnanometer precision in gauge block measurements
Author :
Titov, A. ; Malinovsky, I. ; Belaidi, H. ; Franca, R.S. ; Massone, C.A.
Author_Institution :
INMETRO, Rio de Janeiro, Brazil
Abstract :
An interferometric comparator, featuring subnanometer reproducibility and resolution 10/sup -9/, is reported. A set of experiments is proposed for accurate measurements of corrections for interferometer optics and base plate flatness deviations, as well as for roughness of a block and a plate. A length decrease of 0.2 nm due to cleaning procedure of the block before wringing is detected.
Keywords :
Michelson interferometers; length measurement; light interferometry; measurement by laser beam; measurement standards; measurement uncertainty; 2D length profiles; Michelson interferometer; accurate measurements; base plate flatness deviations; block/plate roughness; cleaning procedure; corrections for interferometer optics; gauge block measurements; interferometric comparator; length decrease; length standards; subnanometer precision; subnanometer reproducibility; uncertainty; Cleaning; Frequency measurement; Instruments; Length measurement; Measurement standards; Optical interferometry; Optical materials; Polarization; Reproducibility of results; Steel;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.700126
