Title :
Micro- / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application
Author :
Vavrinsky, Erik ; Flickyngerova, Sona ; Gaspierik, Pavol ; Skriniarová, Jaroslava ; Novotny, Ivan ; Stopjakova, Viera ; Viglasky, Radovan ; Tvarozek, Vladimir ; Sutta, Pavol
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.
Keywords :
bioMEMS; biomedical electrodes; biomedical materials; blood; microelectrodes; nanobiotechnology; nanostructured materials; semiconductor thin films; sputter etching; zinc compounds; ZnO:Al; biomedical application; biomedicine; blood state monitoring; conductive thin-film microelectrodes; interdigital array; ion-sputter etching; micro/nanostructuralized interfaces; nanostructuralization; photo-assisted electrodeless chemical etching; psychogalvanic reflex; thin film solar cells; transparent thin-film microelectrodes; Argon; Biological materials; Chemicals; Conductive films; Contacts; Microelectrodes; Piezoelectric films; Sputter etching; Sputtering; Wet etching; IDA microelectrodes; ZnO:Al thin films; blood sedimentation; human cognitive processes; non-invasive biomedical monitoring; psycho-galvanic reflex;
Conference_Titel :
Applied Sciences in Biomedical and Communication Technologies, 2009. ISABEL 2009. 2nd International Symposium on
Conference_Location :
Bratislava
Print_ISBN :
978-1-4244-4640-7
Electronic_ISBN :
978-1-4244-4641-4
DOI :
10.1109/ISABEL.2009.5373711
